Thin Film Transistor (TFT) Research Group
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The Thin Film Transistor Research Group at the Rensselaer Polytechnic Institute is involved in all aspects of amorphous silicon and polysilicon thin film transistor research. With its industry partner, the Xerox Palo Alto Research Center, these areas include:
- 2D device simulation,
- analysis of material and device physics,
- the development of analytical models for circuit CAD tools,
- maintenance of the public domain circuit simulator AIM-Spice, which utilizes the TFT models developed here,
- the development of new TFT device structures.
Click here to see a presentation of our research
- Modeling and Scaling of a-Si:H and Poly-Si Thin film Transistors
Click here to see a summary of recent parameter extraction results
- Publications
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- M. S. Shur, H. C. Slade, T. Ytterdal, L. Wang, Z. Xu, K. Aflatooni, Y. Byun, Y. Chen, M. Froggatt, A. Krishnan, P. Mei, H. Meiling, B.-H. Min, A. Nathan, S. Sherman, M. Stewart, and S. Theiss, Modeling and Scaling of a-Si:H and Poly-Si Thin Film Transistors, Mat. Res. Soc. Symp. Proc., vol. 467, pp. 831-842 (1997)
- M. S. Shur, H. C. Slade, M. D. Jacunski, A. A. Owusu, and T. Ytterdal, SPICE Models for Amorphous Silicon and Polysilicon Thin Film Transistors, J. Electrochem. Soc., Vol. 144, No. 8, pp. 2833-2839, (1997).
- H.C. Slade and M. S. Shur, Analysis of Bias Stress on the Performance of Unpassivated Hydrogenated amorphous Silicon Thin Film Transistors, IEEE Trans. Electron Devices, accepted for publication.
- M.S. Shur, H.C. Slade, T. Ytterdal, L. Wang, and Z. Xu, "Modeling and Scaling of a-Si:H and Polysilicon Thin Film Transistors," invited paper to be presented at the Materials Research Society Spring 1997 Meeting, Amorphous and Microcrystalline Silicon Technology, April 1997.
- H. C. Slade, M. S. Shur, S. C. Deane, and M. Hack, "Below Threshold Conduction in a-Si:H TFTs With and Without a Silicon Nitride Passivating Layer," Applied Physics Letters, Vol. 69, No. 17, p. 2560 (October 1996).
- A. Owusu, M. D. Jacunski, M. S. Shur, and T. Ytterdal, SPICE Model for the Kink Effect in Polysilicon TFTs, p. 680, in Meeting Abstracts, vol. 96-2, Fall Meeting, San Antonio, Texas, The Electrochemical Society, New Jersey, ISBN 0160-4619, October 6-11, 1996.
- M. S. Shur, M. D. Jacunski, H. C. Slade, A. A. Owusu, T. Ytterdal, and M. Hack, SPICE Models for Amorphous Silicon and Polysilicon Thin Film Transistors, p. 559, in Meeting Abstracts, vol. 96-2, Fall Meeting, San Antonio, Texas, The Electrochemical Society, New Jersey, ISBN 0160-4619, October 6-11, 1996
- M.D. Jacunski, M.S. Shur, and M. Hack, "Threshold Voltage, Field Effect Mobility, and Gate to Channel Capacitance in Polysilicon TFTs," IEEE Trans. Elec. Dev., vol. 43, September 1996.
- H.C. Slade, M.S. Shur, S.C. Deane, M. Hack, "Physics of Below Threshold Current Distribution in a-Si:H TFTs," Materials Research Society Proceedings, Amorphous Silicon Technology/Materials for Flat Panel Displays, vol. 420, p. 257 (April 1996).
- M.D. Jacunski, M.S. Shur, T. Ytterdal, A.A. Owusu, and M. Hack, "AC and DC Characterization and SPICE Modeling of Short Channel Polysilicon TFTs," presented at the 1996 Materials Research Society Spring Meeting, San Francisco, CA, April 1996.
- M. Shur, M. Jacunski, H. Slade, M. Hack, "Analytical Models for Amorphous and Polysilicon Thin Film Transistors for High Definition Display Technology," J. of the Society for Information Display, vol. 3, no. 4, p. 223, 1995.
- H.C. Slade, "Material and Operational Characterization of Hydrogenated Amorphous Silicon Thin Film Transistors," The Electrochemical Society Interface, vol. 4, no. 4, p. 51, 1995.
- M.D. Jacunski and M.S. Shur, "Drain Current and Capacitance Simulation of Polysilicon Thin Film Transistors," SEMICAD Device 2D Simulation Application Note, Dawn Technologies, Inc., 1995.
- M. Jacunski, M. Shur, A. Owusu, T. Ytterdal, and M. Hack, "SPICE Models for N and P Channel Polysilicon Thin Film Transistors in All Regimes of Operation," in the AMLCDs 95 Workshop Proceedings, p. 134, September 1995.
- H. Slade, M. Shur, and M. Hack, "Temperature Dependent Analytical Model of a-Si Thin Film Transistors," in Proceedings of the 1995 Material Research Society Spring Meeting, April 1995.
- M. Jacunski, M. Shur, and M. Hack, "New Interpretation of Threshold Voltage in Polysilicon TFTs: A Theoretical and Experimental Study," in the Device Research Conference Digest, p. 158, June 1995.
- M. Shur, M. Jacunski, and M. Hack, "Device and Circuit Models for Amorphous Silicon and Polysilicon Thin Film Transistors Used in High Definition Display Technology," in Proceedings of the IDRC, p. 45, 1994.
- H. Slade, T. Globus, M. Shur, B. Gelmont, and M. Hack, "Effect of Stress on the Density of Deep Localized States in Amorphous Silicon Thin Film Transistors," in Electrochemical Society Fall Meeting Conference Proceedings, 1994.
- T. Globus, H. Slade, M. Shur, and M. Hack, "Density of Deep Bandgap States in Amorphous Silicon from the Temperature Dependence of Thin Film Transistor Current," in Materials Research Society Symposium Proceedings, vol. 336, p. 823, 1994.